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<p>We describe the development of a compact, self-contained sensor which uses machine learning to provide an early warning of failure in implanter subsystems. Using commercially available low-power and low-cost MEMS sensors, the system correctly identifies known-good and known-failing systems with an accuracy of better than 99.9%.</p> Graphical abstract <p></p>

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Self-contained predictive diagnostic sensors for implanter subsystems

  • 期刊论文

  • 发表日期：

    2025年2月20日

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  • Scott Galica,
  • Katherine Ferrara,
  • Alastair Fisher,
  • William Sweet,
  • David Kirkwood,
  • William MacDonald

摘要

We describe the development of a compact, self-contained sensor which uses machine learning to provide an early warning of failure in implanter subsystems. Using commercially available low-power and low-cost MEMS sensors, the system correctly identifies known-good and known-failing systems with an accuracy of better than 99.9%.

Graphical abstract