<p>The low-energy high-current implanter has been improved for the material modification process (Kai et al, in: Proc. of International Conference on Ion Implantation Technology, 2022). To achieve a high beam current at low-energy, space charge neutralization becomes a critical factor. Generally, low-energy high-current beam tends to spread due to the high beam potential, making beam transport difficult. In this implanter, a Plasma Flood Gun (PFG) and a gas introduction system for beam neutralization along the beamline are used to improve beam transport efficiency. To evaluate the neutralization capability of the PFG, we used an electrostatic probe to observe changes in plasma potential due to electron supply from the PFG. We confirmed a decrease in potential with electron supply. In the evaluation of the gas introduction system, an increase in beam current was observed by appropriately setting the gas flow rate. Both systems were revealed to be more effective with beam energy.</p> Graphical abstract <p></p>