Abstract <p>The possibility of optimizing the design of a piezoelectric nanogenerator (PENG) based on an array of vertically oriented nitrogen-doped carbon nanotubes (N-CNTs) to increase the efficiency of external mechanical energy conversion is investigated. It is found that the optimal parameters of the top electrode of the PENG include a 0.6-μm-thick polysilicon layer, a 0.6-μm-thick aluminum coating, and a perforated membrane with holes of 2 μm<sup>2</sup> in a 24 × 24 array. It is shown that the proposed design ensures uniform deformation of the N-CNTs and allows an increase in the value of the generated voltage to 3.55 V. The obtained results confirm the prospects of using N-CNTs as a functional material for creating highly efficient PENG.</p>

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Modeling of the Design of a Piezoelectric Nanogenerator Based on N-Doped Carbon Nanotubes

  • D. N. Khomlenko,
  • M. R. Polyvianova,
  • O. I. Il’in,
  • M. V. Il’ina

摘要

Abstract

The possibility of optimizing the design of a piezoelectric nanogenerator (PENG) based on an array of vertically oriented nitrogen-doped carbon nanotubes (N-CNTs) to increase the efficiency of external mechanical energy conversion is investigated. It is found that the optimal parameters of the top electrode of the PENG include a 0.6-μm-thick polysilicon layer, a 0.6-μm-thick aluminum coating, and a perforated membrane with holes of 2 μm2 in a 24 × 24 array. It is shown that the proposed design ensures uniform deformation of the N-CNTs and allows an increase in the value of the generated voltage to 3.55 V. The obtained results confirm the prospects of using N-CNTs as a functional material for creating highly efficient PENG.