Abstract <p>An analysis of the results of a study of the structure and properties of technically pure titanium of VT1-0 grade subjected to surface alloying by irradiation of the “film–substrate” system with a pulsed electron beam is presented. Multi-element films with a composition of 25.7 at % Ti–17.0 at % Al–21.9 at % Nb–22.3&#xa0;at % Zr–13.1 at % Cu, and a thickness of 2.5–3 μm having a multilayer structure and being amorphous-crystalline are formed on the surface of titanium samples using vacuum-arc plasma-assisted method. Surface alloying of titanium samples is carried out by irradiating the “film (TiNbAlZrCu)–(VT1-0) substrate” system with an intensive pulsed electron beam (electron beam energy density of 20 J/cm², pulse duration of 50 μs, number of pulses 3 and 30, pulse repetition frequency of 0.3 s^–1, and residual Ar gas pressure in the setup chamber of 0.02 Pa). It is shown that irradiation of the “film–substrate” system with three pulses of electron beam impact is accompanied by the formation of a multi-element (Ti, Al, Cu, Zr, Nb) multi-phase (TiNbAlZrCu, β-Ti, Cu, α-Ti) submicron-nanocrystalline surface layer. A multiple increase in microhardness of the surface layer of the VT1-0 titanium is revealed both after the formation of a film of the Ti–Al–Cu–Zr–Nb composition on the surface, close to equi-atomic composition, and after irradiation of the “film–substrate” system with a pulsed electron beam. It is established that film deposition leads to a multiple (more than 13 times) increase in wear resistance of the “film–substrate” system, and subsequent irradiation for the purpose of forming an alloyed surface layer is accompanied by a decrease in the wear resistance of samples.</p>