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Abstract <p>Zr–Ti–B–C–N coatings were obtained by reactive pulsed magnetron sputtering at frequencies of 0, 50, and 350 kHz. The coatings contained a high total concentration of non-metallic elements in the range of 80–84 at % and had a dense, low-defect amorphous structure. The coatings were dominated by B–N, B–C, and Zr–O bonds. The hardness of the coatings was 8–9 GPa, and the modulus of elasticity and elastic recovery were within the ranges of 126–144 GPa and 36–40%, respectively. The coating deposited at a frequency of 350 Hz had the lowest coefficient of friction (~0.15). The maximum optical transmittance of ~90% was demonstrated by a coating obtained at 50 kHz characterized by minimal thickness and increased oxygen concentration. The Zr–Ti–B–C–N coatings with the optimal composition outperformed the Zr–B–N comparison samples in terms of transmittance.</p>

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Structure and Properties of Zr–Ti–B–C–N Coatings Obtained by Pulsed Magnetron Sputtering

  • 期刊论文

  • 发表日期：

    2025年10月1日

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  • Ph. V. Kiryukhantsev-Korneev,
  • A. D. Chertova,
  • V. M. Kasimova,
  • E. V. Zabelina,
  • E. A. Levashov

摘要

Abstract

Zr–Ti–B–C–N coatings were obtained by reactive pulsed magnetron sputtering at frequencies of 0, 50, and 350 kHz. The coatings contained a high total concentration of non-metallic elements in the range of 80–84 at % and had a dense, low-defect amorphous structure. The coatings were dominated by B–N, B–C, and Zr–O bonds. The hardness of the coatings was 8–9 GPa, and the modulus of elasticity and elastic recovery were within the ranges of 126–144 GPa and 36–40%, respectively. The coating deposited at a frequency of 350 Hz had the lowest coefficient of friction (~0.15). The maximum optical transmittance of ~90% was demonstrated by a coating obtained at 50 kHz characterized by minimal thickness and increased oxygen concentration. The Zr–Ti–B–C–N coatings with the optimal composition outperformed the Zr–B–N comparison samples in terms of transmittance.