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Abstract <p>The morphology, structural features, and optical properties of zinc oxide films of various thicknesses, synthesized by thermal oxidation in an air atmosphere of polycrystalline zinc layers with a thickness of 10, 20, 40, 50, 60, and 80 nm, obtained by magnetron sputtering on glass substrates, are studied. The influence of the thickness of the initial layers and the size of zinc crystals on the characteristics of the crystal structure and properties of the resulting zinc oxide films, as well as the patterns of the approximation of its optical band gap and crystal lattice parameters to the values for bulk zinc oxide (ZnO) crystals with increasing film thickness, are analyzed.</p>

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Influence of the Initial Zinc Nanolayers Obtained by Magnetron Sputtering on the Properties of Thin Zinc Oxide Films Synthesized on Their Basis by Thermal Oxidation

  • 期刊论文

  • 发表日期：

    2025年2月1日

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  • V. V. Tomaev,
  • V. A. Polishchuk,
  • N. B. Leonov

摘要

Abstract

The morphology, structural features, and optical properties of zinc oxide films of various thicknesses, synthesized by thermal oxidation in an air atmosphere of polycrystalline zinc layers with a thickness of 10, 20, 40, 50, 60, and 80 nm, obtained by magnetron sputtering on glass substrates, are studied. The influence of the thickness of the initial layers and the size of zinc crystals on the characteristics of the crystal structure and properties of the resulting zinc oxide films, as well as the patterns of the approximation of its optical band gap and crystal lattice parameters to the values for bulk zinc oxide (ZnO) crystals with increasing film thickness, are analyzed.