Structural Design of Zn/Ag/Fe/Cu Targets and Formation of ZnO/Ag/Fe/Cu Thin Films of p-Type Conductivity by the DC-Magnetron Method at Room Temperature
摘要
By doping zinc with transition metals (Ag + Fe + Cu), the following targets were formed: Zn/Ag/Fe/Cu (Zn95, Ag2, Fe2, Cu 1%; Zn94, Ag2, Fe2, Cu2% and Zn92, Ag2, Fe3, Cu3%). Targets with insignificant changes in the Zn lattice parameters were obtained. Nanosized ZnO/Ag/Fe/Cu films with p-type conductivity on glass substrates at room temperature were formed by DC-magnetron sputtering of Zn/Ag/Fe/Cu targets at about 0.666 Pa. The structural, electrophysical, optical, and morphological characteristics of the obtained films were investigated using X-ray diffractometry (XRD), atomic force microscopy, UV/VIS spectroscopy, and Hall measurements. The diffraction patterns of the ZnO/Ag/Fe/Cu films revealed characteristic reflexes of interplanar spacings along the 002 and 101, as well as 100 and 010 crystallographic directions. The transmittance of the studied films was approximately 85–97% in the wavelength range of 460–930 nm. The concentration of free carriers in the ZnO/Ag/Fe/Cu films was approximately 1021 cm–3. The ZnO/Ag/Fe/Cu films can be integrated into optoelectronic devices as functional elements.