Abstract <p>The development of UV sensors with a narrow and easily tunable sensitivity range is an urgent problem for detecting UV radiation and determining its spectral composition. This problem can be solved using titanium dioxide nanotubes (TiO₂ NT) arrays as resistive photodetectors. In this study, the dependences of the quantum efficiency spectra of TiO₂ NT nanotube arrays on the anodic oxidation time and heat treatment temperature have been described. TiO₂ NT nanotube arrays have been obtained by anodic oxidation of titanium foil in a fluorine-containing ethylene glycol-based electrolyte in the potentiostatic mode. The results of a scanning electron microscopy study of the morphology of TiO₂ NT nanostructures and a Raman scattering study of the phase composition of the samples and their luminescence intensity as functions of the anodic oxidation time and post-treatment temperature are reported. The data of the photocurrent spectroscopy measurements of the quantum efficiency of TiO₂ NT nanotube arrays are presented. It has been found that the maximum efficiency at a wavelength of 360 nm is characteristic of the samples formed within 1 h and heat-treated at a temperature of 400°C and the maximum quantum efficiency corresponding to wavelengths less than 300 nm is characteristic of the samples subjected to anodic oxidation for 5 min and heat-treated at a temperature of 350°C.</p>