Abstract <p>We propose a 7 nm high-<i>k</i> gate stack triple material gate (TMG) nanosheet field effect transistor (NSFET) and compare its DC characteristics with a single material gate (SMG) NSFET. The transfer characteristics (<InlineEquation ID="IEq1"> <InlineMediaObject> <ImageObject Color="BlackWhite" FileRef="11453_2025_3604_Article_IEq1.gif" Format="GIF" Height="16" Rendition="HTML" Resolution="72" Type="Linedraw" Width="18" /> </InlineMediaObject> <EquationSource Format="TEX">\({{I}_{{\text{D}}}}\)</EquationSource> <!--Semicnd2560057Sunani-m1--> </InlineEquation>–<InlineEquation ID="IEq2"> <InlineMediaObject> <ImageObject Color="BlackWhite" FileRef="11453_2025_3604_Article_IEq2.gif" Format="GIF" Height="16" Rendition="HTML" Resolution="72" Type="Linedraw" Width="27" /> </InlineMediaObject> <EquationSource Format="TEX">\({{V}_{{{\text{GS}}}}}\)</EquationSource> <!--Semicnd2560057Sunani-m2--> </InlineEquation>), output characteristics (<InlineEquation ID="IEq3"> <InlineMediaObject> <ImageObject Color="BlackWhite" FileRef="11453_2025_3604_Article_IEq1.gif" Format="GIF" Height="16" Rendition="HTML" Resolution="72" Type="Linedraw" Width="18" /> </InlineMediaObject> <EquationSource Format="TEX">\({{I}_{{\text{D}}}}\)</EquationSource> <!--Semicnd2560057Sunani-m3--> </InlineEquation>–<InlineEquation ID="IEq4"> <InlineMediaObject> <ImageObject Color="BlackWhite" FileRef="11453_2025_3604_Article_IEq4.gif" Format="GIF" Height="16" Rendition="HTML" Resolution="72" Type="Linedraw" Width="27" /> </InlineMediaObject> <EquationSource Format="TEX">\({{V}_{{{\text{DS}}}}}\)</EquationSource> <!--Semicnd2560057Sunani-m4--> </InlineEquation>), drain-induced barrier lowering (<InlineEquation ID="IEq5"> <InlineMediaObject> <ImageObject Color="BlackWhite" FileRef="11453_2025_3604_Article_IEq5.gif" Format="GIF" Height="14" Rendition="HTML" Resolution="72" Type="Linedraw" Width="41" /> </InlineMediaObject> <EquationSource Format="TEX">\({\text{DIBL}}\)</EquationSource> <!--Semicnd2560057Sunani-m5--> </InlineEquation>), subthreshold swing (<InlineEquation ID="IEq6"> <InlineMediaObject> <ImageObject Color="BlackWhite" FileRef="11453_2025_3604_Article_IEq6.gif" Format="GIF" Height="14" Rendition="HTML" Resolution="72" Type="Linedraw" Width="26" /> </InlineMediaObject> <EquationSource Format="TEX">\(SS\)</EquationSource> <!--Semicnd2560057Sunani-m6--> </InlineEquation>), ON current (<i>I</i><sub>ON</sub>) to OFF current (<i>I</i><sub>OFF</sub>) ratio (<i>I</i><sub>ON</sub>/<i>I</i><sub>OFF</sub>) are estimated, compared and analyzed. <i>I</i><sub>ON</sub>/<i>I</i><sub>OFF</sub> of 10<sup>8</sup> and 10<sup>4</sup>, DIBL of 22.22 and 44.44 mV/V, and <InlineEquation ID="IEq7"> <InlineMediaObject> <ImageObject Color="BlackWhite" FileRef="11453_2025_3604_Article_IEq6.gif" Format="GIF" Height="14" Rendition="HTML" Resolution="72" Type="Linedraw" Width="26" /> </InlineMediaObject> <EquationSource Format="TEX">\(SS\)</EquationSource> <!--Semicnd2560057Sunani-m7--> </InlineEquation> of 80 mV/dec and 90 mV/dec are obtained for TMG and SMG NSFET respectively. We also analyzed RF performance characteristics of SMG and TMG NSFETs like transconductance (<InlineEquation ID="IEq8"> <InlineMediaObject> <ImageObject Color="BlackWhite" FileRef="11453_2025_3604_Article_IEq8.gif" Format="GIF" Height="12" Rendition="HTML" Resolution="72" Type="Linedraw" Width="22" /> </InlineMediaObject> <EquationSource Format="TEX">\({{g}_{m}}\)</EquationSource> <!--Semicnd2560057Sunani-m8--> </InlineEquation>), output conductance (<InlineEquation ID="IEq9"> <InlineMediaObject> <ImageObject Color="BlackWhite" FileRef="11453_2025_3604_Article_IEq9.gif" Format="GIF" Height="12" Rendition="HTML" Resolution="72" Type="Linedraw" Width="19" /> </InlineMediaObject> <EquationSource Format="TEX">\({{g}_{d}}\)</EquationSource> <!--Semicnd2560057Sunani-m9--> </InlineEquation>), transconductance generation factor (<InlineEquation ID="IEq10"> <InlineMediaObject> <ImageObject Color="BlackWhite" FileRef="11453_2025_3604_Article_IEq10.gif" Format="GIF" Height="14" Rendition="HTML" Resolution="72" Type="Linedraw" Width="37" /> </InlineMediaObject> <EquationSource Format="TEX">\({\text{TGF}}\)</EquationSource> <!--Semicnd2560057Sunani-m10--> </InlineEquation>), and early voltage (<i>V</i><sub>EA</sub>). Additionally, we have examined SMG and TMG NSFET Parasitic capacitance (<InlineEquation ID="IEq11"> <InlineMediaObject> <ImageObject Color="BlackWhite" FileRef="11453_2025_3604_Article_IEq11.gif" Format="GIF" Height="19" Rendition="HTML" Resolution="72" Type="Linedraw" Width="27" /> </InlineMediaObject> <EquationSource Format="TEX">\({{C}_{{gg}}}\)</EquationSource> <!--Semicnd2560057Sunani-m11--> </InlineEquation>), cut-off frequency (<InlineEquation ID="IEq12"> <InlineMediaObject> <ImageObject Color="BlackWhite" FileRef="11453_2025_3604_Article_IEq12.gif" Format="GIF" Height="17" Rendition="HTML" Resolution="72" Type="Linedraw" Width="19" /> </InlineMediaObject> <EquationSource Format="TEX">\({{f}_{{\text{T}}}}\)</EquationSource> <!--Semicnd2560057Sunani-m12--> </InlineEquation>), dynamic power, and average power. These values suggest that the TMG NSFET device has improved DIBL, SS, and <i>I</i><sub>ON</sub>/<i>I</i><sub>OFF</sub> switching, less leakage current, improved capacitance and frequency characteristics compared to SMG NSFET, suitable for improved Power, Performance and Area (PPA).</p>

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A simulation study of 7 nm Si-based Multiple Gate Material Nanosheet Field Effect Transistors

  • Shankhamitra Sunani,
  • Satya Sopan Mahato,
  • Narayan Sahoo,
  • Asisa Kumar Panigrahy,
  • Raghunandan Swain

摘要

Abstract

We propose a 7 nm high-k gate stack triple material gate (TMG) nanosheet field effect transistor (NSFET) and compare its DC characteristics with a single material gate (SMG) NSFET. The transfer characteristics ( \({{I}_{{\text{D}}}}\) \({{V}_{{{\text{GS}}}}}\) ), output characteristics ( \({{I}_{{\text{D}}}}\) \({{V}_{{{\text{DS}}}}}\) ), drain-induced barrier lowering ( \({\text{DIBL}}\) ), subthreshold swing ( \(SS\) ), ON current (ION) to OFF current (IOFF) ratio (ION/IOFF) are estimated, compared and analyzed. ION/IOFF of 108 and 104, DIBL of 22.22 and 44.44 mV/V, and \(SS\) of 80 mV/dec and 90 mV/dec are obtained for TMG and SMG NSFET respectively. We also analyzed RF performance characteristics of SMG and TMG NSFETs like transconductance ( \({{g}_{m}}\) ), output conductance ( \({{g}_{d}}\) ), transconductance generation factor ( \({\text{TGF}}\) ), and early voltage (VEA). Additionally, we have examined SMG and TMG NSFET Parasitic capacitance ( \({{C}_{{gg}}}\) ), cut-off frequency ( \({{f}_{{\text{T}}}}\) ), dynamic power, and average power. These values suggest that the TMG NSFET device has improved DIBL, SS, and ION/IOFF switching, less leakage current, improved capacitance and frequency characteristics compared to SMG NSFET, suitable for improved Power, Performance and Area (PPA).