Coefficient of Thermal Accommodation of O2 Molecules in Pyrex during a DC Discharge in Oxygen
摘要
Abstract
The radial distribution of gas temperature in a DC glow discharge in pure oxygen in a Pyrex tube was measured in different discharge regimes in the pressure range 1–5 Torr. Analysis of the obtained results allowed us to determine the thermal accommodation coefficient for oxygen molecules on Pyrex: 0.26 ± 0.02. The thermal accommodation coefficient determines the spatial distribution of temperature in the plasma-chemical reactor, the kinetics of reactions with heavy particles in the discharge, and the rate of plasma-chemical processing of materials.