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Abstract <p>In this work we investigate the influence of parameters of electrostatic-assisted ultrasonic spray process on the quality of deposited photoresist film. We have observed forming and drying of liquid film, forming of dried aerosol layer and in situ drying process, according to deposition parameters variation. Best film quality was achieved at the temperature, significantly lower than typical photoresist drying temperature.</p>

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Optimization of Electrostatic-Assisted Ultrasonic Spray Coating of Photoresist Film

  • 期刊论文

  • 发表日期：

    2025年12月1日

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  • V. A. Petukhov,
  • K. A. Tsarik,
  • A. V. Lashkov

摘要

Abstract

In this work we investigate the influence of parameters of electrostatic-assisted ultrasonic spray process on the quality of deposited photoresist film. We have observed forming and drying of liquid film, forming of dried aerosol layer and in situ drying process, according to deposition parameters variation. Best film quality was achieved at the temperature, significantly lower than typical photoresist drying temperature.