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Abstract <p>The present minireview considers fundamental electrochemistry and its relation to microelectronics. Various solid electrolytes, principally inorganic ones are described, including LiPON, and diverse sulfide and oxide electrolytes. Examples of all-solid-state electrochemical devices important for microelectronics are described and discussed, such as electrochemical gas compressors and gas purification systems, electrochemical gas sensors, including high-temperature ones, as well microbatteries and thin-film batteries.</p>

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Solid-State Electrochemistry in Microelectronics

  • 期刊论文

  • 发表日期：

    2025年12月1日

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  • A. Skundin,
  • T. Kulova,
  • A. Rudy

摘要

Abstract

The present minireview considers fundamental electrochemistry and its relation to microelectronics. Various solid electrolytes, principally inorganic ones are described, including LiPON, and diverse sulfide and oxide electrolytes. Examples of all-solid-state electrochemical devices important for microelectronics are described and discussed, such as electrochemical gas compressors and gas purification systems, electrochemical gas sensors, including high-temperature ones, as well microbatteries and thin-film batteries.