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Abstract <p>Using the Ritz method, the maximum membrane deflection and the magnitude of mechanical stress are calculated depending on the geometric dimensions of the membrane and the parameters of the deposited SiO<sub>2</sub> layer. A comparative assessment is carried out of the magnitude of deformation and mechanical stresses in the structure of an absolute pressure transducer with a polysilicon membrane radius of 50 μm and a sandwich structure of a MEMS acoustic pressure transducer consisting of layers of polysilicon and deposited SiO<sub>2</sub> with a membrane radius of 300 µm, arising from the application of a layer of SiO<sub>2</sub>.</p>

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Deformation of a MEMS Transducer Membrane with a Deposited Stressed Layer

  • 期刊论文

  • 发表日期：

    2025年10月1日

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  • V. V. Amelichev,
  • S. S. Generalov,
  • I. V. Godovitsyn,
  • S. A. Polomoshnov,
  • M. A. Saurov

摘要

Abstract

Using the Ritz method, the maximum membrane deflection and the magnitude of mechanical stress are calculated depending on the geometric dimensions of the membrane and the parameters of the deposited SiO2 layer. A comparative assessment is carried out of the magnitude of deformation and mechanical stresses in the structure of an absolute pressure transducer with a polysilicon membrane radius of 50 μm and a sandwich structure of a MEMS acoustic pressure transducer consisting of layers of polysilicon and deposited SiO2 with a membrane radius of 300 µm, arising from the application of a layer of SiO2.