Physical Principles of Construction of Industrial Spectrometers of Low-Energy Backscattered Ions and Recoil Atoms
摘要
Abstract
Based on the results of the application of backscattered ion and recoil atom spectrometers, their analytical capabilities and technical and consumer characteristics have been determined. The principles of building complex spectrometers in combination with other methods of analysis of the surface of technological objects and analytical modules embedded in technological equipment have been defined.