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Abstract <p>The calculation of compression ratio and pumping speed is a critical step in the research &amp; development of a turbomolecular pump (TMP). The work presents an algorithm for simulating molecular gas flow inside a TMP. This algorithm is based on rotor and stator 3D-models for operation making the process of&#xa0;the determination TMPs characteristics fast and easy. Calculations of main parts of TMP are presented and compared with published and experimental data.</p>

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Numerical Simulation of a Turbomolecular Pump with a Combined Flow Path

  • 期刊论文

  • 发表日期：

    2025年12月1日

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  • A. N. Sinelnikov,
  • M. Yu. Ryzhov,
  • N. R. Gall

摘要

Abstract

The calculation of compression ratio and pumping speed is a critical step in the research & development of a turbomolecular pump (TMP). The work presents an algorithm for simulating molecular gas flow inside a TMP. This algorithm is based on rotor and stator 3D-models for operation making the process of the determination TMPs characteristics fast and easy. Calculations of main parts of TMP are presented and compared with published and experimental data.