Abstract <p>The paper examines the patterns of formation of the relief of titanium and molybdenum nanofilms using a fractal approach. It is shown that the microtopography of the surfaces of both materials is characterized by a high degree of structural complexity, while molybdenum films have greater fractal dimension, roughness, and variability in altitude characteristics than those for titanium ones. The paper emphasizes the potential of fractal analysis as a reliable tool for quantitative assessment of the morphology of nanostructured coatings and identification of structural features affecting the optical, catalytic, and electrochemical properties of materials. In particular, the fractal dimension can be used as a characteristic quantity for a comprehensive description of the surface of nanoscale metal films.</p>