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Abstract <p>A compact two-dimensional high-resolution detector for X-ray imaging has been developed. The main elements of the detector are a 20-μm-thick LuAG:Ce scintillation crystal and a monochrome CMOS sensor with a resolution of 20 MP and a shooting rate of up to 20 frame/s. The detector efficiency has been estimated on an Excillium MetalJet D2 laboratory source with a GaIn liquid anode. The objects of study were a copper mesh with a 25.4 µm period and a test structure made of tantalum, 500 nm thick, with a radially decreasing pattern (Siemens star). Additionally, radiography of a biological object (centipede) was carried out. The spatial resolution of the detector was less than 3 μm.</p>

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High-Resolution Detector for X-ray Visualization

  • 期刊论文

  • 发表日期：

    2025年2月1日

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  • A. L. Astafyev,
  • D. A. Zverev,
  • M. A. Voevodina,
  • A. A. Barannikov,
  • I. B. Panormov,
  • A. A. Snigirev

摘要

Abstract

A compact two-dimensional high-resolution detector for X-ray imaging has been developed. The main elements of the detector are a 20-μm-thick LuAG:Ce scintillation crystal and a monochrome CMOS sensor with a resolution of 20 MP and a shooting rate of up to 20 frame/s. The detector efficiency has been estimated on an Excillium MetalJet D2 laboratory source with a GaIn liquid anode. The objects of study were a copper mesh with a 25.4 µm period and a test structure made of tantalum, 500 nm thick, with a radially decreasing pattern (Siemens star). Additionally, radiography of a biological object (centipede) was carried out. The spatial resolution of the detector was less than 3 μm.