Abstract <p>The piezoelectric properties of thin polyvinylidene fluoride films with a thickness of 9 μm were studied after irradiation with fast heavy ions Ne, Xe, and Bi with a fluence of about 10⁹ ions/cm². The effect of Xe ion fluence in the range from 10⁵ to 10¹⁰ ions/cm² on the piezoelectric characteristics of PVDF was also studied. The results showed that irradiation with high-energy ions promotes the formation of the piezoelectric module d₃₃ in PVDF films. This effect is due to thermal and structural transformations caused by heavy ions. Additional polarization in the electric field of a negative corona discharge leads to an enhancement of the piezoelectric response. At the same time, chemical etching causes an exponential decrease in the value of d₃₃, which may be associated with the destruction of β-phase areas and an increase in conductivity along ion tracks, leading to charge leakage and a decrease in residual polarization.</p>