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Abstract <p>Literature data on methods for synthesizing hexafluoroethane, a gaseous fluorine carrier used for silicon etching in the semiconductor industry, are summarized: catalytic fluorination of chlorofluorocarbons with hydrogen fluoride; fluorination of ethane, ethylene, fluoroethanes, fluoroethylenes, chlorofluoroethanes, and chlorofluoroethylenes with fluorine, variable-valence metal fluorides, and uranium hexafluoride; fluorination of carbon with fluorine; pyrolysis of perfluorocarbons; electrochemical methods. The advantages and disadvantages of these methods are outlined. Methods for purifying hexafluoroethane from impurities formed during synthesis are also considered: decantation, neutralization, rectification, adsorption, and others. Methods for analyzing the composition of hexafluoroethane are described, including gas chromatography, spectral methods, and determination of gas moisture and acidity.</p>

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Synthesis Methods, Purification, and Composition Analysis of Hexafluoroethane: A Review

  • 期刊论文

  • 发表日期：

    2025年10月1日

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  • E. V. Sadikova,
  • D. S. Pashkevich,
  • V. V. Kapustin,
  • T. S. Kholopova,
  • E. S. Kurapova,
  • A. M. Chebysheva,
  • T. A. Fedorova,
  • O. V. Platonova,
  • P. S. Kambur

摘要

Abstract

Literature data on methods for synthesizing hexafluoroethane, a gaseous fluorine carrier used for silicon etching in the semiconductor industry, are summarized: catalytic fluorination of chlorofluorocarbons with hydrogen fluoride; fluorination of ethane, ethylene, fluoroethanes, fluoroethylenes, chlorofluoroethanes, and chlorofluoroethylenes with fluorine, variable-valence metal fluorides, and uranium hexafluoride; fluorination of carbon with fluorine; pyrolysis of perfluorocarbons; electrochemical methods. The advantages and disadvantages of these methods are outlined. Methods for purifying hexafluoroethane from impurities formed during synthesis are also considered: decantation, neutralization, rectification, adsorption, and others. Methods for analyzing the composition of hexafluoroethane are described, including gas chromatography, spectral methods, and determination of gas moisture and acidity.