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<p><b>Abstract</b>—The processes that occur in silicon nitride-based ceramic materials under ytterbium laser radiation are investigated. The effect of laser processing speed in the range 5–15 mm/s on the microstructure and phase composition of the cut surface is studied. The formation of a defective layer is shown to be affected by the thermal decomposition of the ceramics and the melting and oxidation of the reaction products. The best surface quality is achieved at a laser processing speed of 5 mm/s.</p>

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Effect of the Laser Cutting Speed on the Cut Surface Structure of Silicon Nitride-Based Ceramics

  • 期刊论文

  • 发表日期：

    2025年4月1日

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  • N. K. Georgiu,
  • A. I. Zhmurin,
  • A. A. Zhuravlev,
  • A. I. Ganichev,
  • A. V. Ivanov,
  • M. G. Lisachenko

摘要

Abstract—The processes that occur in silicon nitride-based ceramic materials under ytterbium laser radiation are investigated. The effect of laser processing speed in the range 5–15 mm/s on the microstructure and phase composition of the cut surface is studied. The formation of a defective layer is shown to be affected by the thermal decomposition of the ceramics and the melting and oxidation of the reaction products. The best surface quality is achieved at a laser processing speed of 5 mm/s.