Abstract <p>Due to its unique electronic and optical properties, ternary indium–gallium–zinc oxide (IGZO) is applied in flexible and transparent electronics, including in particular thin-film transistors. The IGZO physical properties depend on the synthesis conditions and the ratio of its main constituents (indium, gallium, zinc, and oxygen) and various dopants. A method to synthesize samples of the In<sub>1–2<i>x</i></sub>GaSn<sub><i>x</i></sub>Zn<sub>1+<i>x</i></sub>O<sub>4</sub> series (<i>x</i>&#xa0;=&#xa0;0.05, 0.10, 0.15) by nitrate-organic gel combustion is described. In this approach, the synthesis can be carried out in a shorter time and at lower temperatures compared to alternative methods reported in the literature. The resulting samples are studied by powder X-ray diffraction, scanning electron microscopy, and energy-dispersive spectroscopy. The homogeneity of the samples is proved at <i>x</i>&#xa0;=&#xa0;0.05 and 0.10.</p>

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Synthesis of Tin-Substituted Indium–Gallium–Zinc Oxide at Low Temperatures

  • G. M. Zirnik,
  • S. A. Sozykin,
  • A. I. Kovalev,
  • D. P. Sherstyuk,
  • A. S. Chernukha,
  • I. A. Solizoda,
  • G. M. Boleiko,
  • S. A. Gudkova,
  • D. A. Vinnik

摘要

Abstract

Due to its unique electronic and optical properties, ternary indium–gallium–zinc oxide (IGZO) is applied in flexible and transparent electronics, including in particular thin-film transistors. The IGZO physical properties depend on the synthesis conditions and the ratio of its main constituents (indium, gallium, zinc, and oxygen) and various dopants. A method to synthesize samples of the In1–2xGaSnxZn1+xO4 series (x = 0.05, 0.10, 0.15) by nitrate-organic gel combustion is described. In this approach, the synthesis can be carried out in a shorter time and at lower temperatures compared to alternative methods reported in the literature. The resulting samples are studied by powder X-ray diffraction, scanning electron microscopy, and energy-dispersive spectroscopy. The homogeneity of the samples is proved at x = 0.05 and 0.10.