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<p>A cylindrical microresonator based on standard silica optical fibers is a promising simple platform for creating nonlinear devices, but it requires high pump power to observe nonlinear effects. This paper examines the feasibility of magnetron sputtering thin films from silicon and silicon nitride layers with a high nonlinear refractive index. It is shown that during sputtering the Q-factor drops to 10<sup>5</sup> and 10<sup>6</sup> for silicon and silicon nitride films, respectively.</p>

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Cylindrical Microresonators Based on Silicon and Silicon Nitride Fibers Fabricated by Magnetron Sputtering

  • 期刊论文

  • 发表日期：

    2025年12月1日

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  • N. A. Makarova,
  • V. S. Terentyev,
  • I. D. Vatnik

摘要

A cylindrical microresonator based on standard silica optical fibers is a promising simple platform for creating nonlinear devices, but it requires high pump power to observe nonlinear effects. This paper examines the feasibility of magnetron sputtering thin films from silicon and silicon nitride layers with a high nonlinear refractive index. It is shown that during sputtering the Q-factor drops to 105 and 106 for silicon and silicon nitride films, respectively.