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Abstract <p>Aiming at the challenges of high cost, complex manufacturing processes, and low efficiency in coupling and alignment for microlens arrays on the surface of optoelectronic devices, a fabrication method of self-forming and self-aligning microlens array is proposed. The method forms a microlens array based on the interaction of surface tension, gravity, and air pressure of a liquid transparent packaging medium, aiming at simplifying the manufacturing process of the microlens array on the surface of an optoelectronic device, reducing the cost and improving the production efficiency. Firstly, this paper theoretically analyzes the force on the lower liquid surface after the liquid transparent encapsulation medium drops on the upper surface of the metal film step and discusses the feasibility of forming microlens array by this method. After calculation, the filling factor is improved by 15.4% under the conditions of pixel size of 13 μm, photosensitive area of 10 μm, metal film mesh diameter of 12 μm, and metal step height of 2 μm. Then, experiments are carried out on two kinds of metal meshes with different specifications. Experimental results demonstrate that this method effectively produces microlens arrays with excellent uniformity and has obvious convergence effect on light. Microlens arrays show good performance in metal mesh arrays with apertures of 1 mm and 80 μm and have good application prospects in array photodetectors, displays, optical imaging, optical communication, and other fields.</p>

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Feasibility Study on Self-forming Self-aligned Microlens Array Fabricated by Transparent Packaging Medium

  • 期刊论文

  • 发表日期：

    2026年2月1日

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  • X. T. Zhang,
  • Y. F. Yang,
  • C. Q. Guo,
  • Y. Wu,
  • L. Wang,
  • L. Liu,
  • L. N. Liu,
  • L. B. Li,
  • X. X. Han,
  • Z. B. Li,
  • G. Q. Zhang

摘要

Abstract

Aiming at the challenges of high cost, complex manufacturing processes, and low efficiency in coupling and alignment for microlens arrays on the surface of optoelectronic devices, a fabrication method of self-forming and self-aligning microlens array is proposed. The method forms a microlens array based on the interaction of surface tension, gravity, and air pressure of a liquid transparent packaging medium, aiming at simplifying the manufacturing process of the microlens array on the surface of an optoelectronic device, reducing the cost and improving the production efficiency. Firstly, this paper theoretically analyzes the force on the lower liquid surface after the liquid transparent encapsulation medium drops on the upper surface of the metal film step and discusses the feasibility of forming microlens array by this method. After calculation, the filling factor is improved by 15.4% under the conditions of pixel size of 13 μm, photosensitive area of 10 μm, metal film mesh diameter of 12 μm, and metal step height of 2 μm. Then, experiments are carried out on two kinds of metal meshes with different specifications. Experimental results demonstrate that this method effectively produces microlens arrays with excellent uniformity and has obvious convergence effect on light. Microlens arrays show good performance in metal mesh arrays with apertures of 1 mm and 80 μm and have good application prospects in array photodetectors, displays, optical imaging, optical communication, and other fields.