Abstract <p>The paper presents a study of the plasma characteristics with non-local properties in an atmospheric-pressure microdischarge generated in a helium flow. Using a wall probe, the plasma parameters were determined: temperature of the main group of electrons; density of metastable atoms and plasma. The impurity content was also assessed <InlineEquation ID="IEq1"> <EquationSource Format="TEX">\({{{\text{N}}}_{2}}\)</EquationSource> <!--HighEn2570079Sysoev-m1--> </InlineEquation>, <InlineEquation ID="IEq2"> <EquationSource Format="TEX">\({{{\text{O}}}_{2}}\)</EquationSource> <!--HighEn2570079Sysoev-m2--> </InlineEquation> n the plasma-forming gas. Additional studies were conducted using optical spectroscopy. A comparative analysis of two methods for determining impurities in buffer helium was conducted. Optical spectroscopy allows one to determine more chemical elements in plasma <InlineEquation ID="IEq3"> <EquationSource Format="TEX">\({\text{OH}}\)</EquationSource> <!--HighEn2570079Sysoev-m3--> </InlineEquation>, <InlineEquation ID="IEq4"> <EquationSource Format="TEX">\({\text{He}}\)</EquationSource> <!--HighEn2570079Sysoev-m4--> </InlineEquation>, <InlineEquation ID="IEq5"> <EquationSource Format="TEX">\({{{\text{N}}}_{2}}\)</EquationSource> <!--HighEn2570079Sysoev-m5--> </InlineEquation>, <InlineEquation ID="IEq6"> <EquationSource Format="TEX">\({{{\text{O}}}_{2}}\)</EquationSource> <!--HighEn2570079Sysoev-m6--> </InlineEquation>, <InlineEquation ID="IEq7"> <EquationSource Format="TEX">\({\text{O}}\)</EquationSource> <!--HighEn2570079Sysoev-m7--> </InlineEquation> and <InlineEquation ID="IEq8"> <EquationSource Format="TEX">\({\text{N}}\)</EquationSource> <!--HighEn2570079Sysoev-m8--> </InlineEquation>, but not under all discharge conditions. It is shown that this discharge cell can act as an independent PLES analyzer for determining the composition of a gas mixture at atmospheric pressure, and does not require maintaining a high vacuum in the detector area.</p>

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Study of Atmospheric-Pressure Microdischarge by Probe and Spectroscopic Methods

  • S. S. Sysoev,
  • D. D. Gushchin,
  • A. A. Saifutdinova

摘要

Abstract

The paper presents a study of the plasma characteristics with non-local properties in an atmospheric-pressure microdischarge generated in a helium flow. Using a wall probe, the plasma parameters were determined: temperature of the main group of electrons; density of metastable atoms and plasma. The impurity content was also assessed \({{{\text{N}}}_{2}}\) , \({{{\text{O}}}_{2}}\) n the plasma-forming gas. Additional studies were conducted using optical spectroscopy. A comparative analysis of two methods for determining impurities in buffer helium was conducted. Optical spectroscopy allows one to determine more chemical elements in plasma \({\text{OH}}\) , \({\text{He}}\) , \({{{\text{N}}}_{2}}\) , \({{{\text{O}}}_{2}}\) , \({\text{O}}\) and \({\text{N}}\) , but not under all discharge conditions. It is shown that this discharge cell can act as an independent PLES analyzer for determining the composition of a gas mixture at atmospheric pressure, and does not require maintaining a high vacuum in the detector area.