Structure and Properties of Titania Coatings Formed by the Plasma-Assisted Vacuum Arc Method
摘要
Abstract
Titania coatings have been formed by the plasma-assisted vacuum arc deposition, and their structure, phase composition, and properties have been studied in detail. It has been shown that the discharge current of the gas plasma source is a key parameter for controlling the polymorphic composition, hardness, and wear resistance of the titania coating. Titania is present in the coatings in two polymorphs, namely, rutile and anatase; their relative content depends on plasma assistance conditions. Titania coatings, regardless of the plasma assistance mode, are a nanocrystalline material with a columnar structure.