Scholarlink

Abstract <p>The distinctive glow features of low-temperature RF ethane, ethylene, and acetylene plasma polymerization and the correlation with plasma-polymerized film characterizations were investigated. It shows that monomers with different chemical structures significantly affect the deposition rate. Increasing system pressure reduces plasma volume and glow discharge intensity, as detected by optical emission spectroscopy (OES), due to a decreased mean free path of electrons in the gas. Different monomers exhibit variations in glow discharge color and intensity, with acetylene’s bond structure producing a higher intensity glow discharge compared to ethylene and ethane. The plasma polymerized film thickness correlates with OES measurements, where higher optical emission intensity results in thicker film growth. In remote regions, limited free radical diffusion leads to generally lower film thickness, which further decreases with increasing pressure. Scanning electron microscopy reveals flat morphologies for ethane and ethylene plasmas, while acetylene plasma shows significant surface morphological change in the glow area. Chemical analysis indicates similar surface functional groups across polymer formation from hydrocarbon monomers, with slight pressure-induced variations in absorption strength. The carbon content of hydrocarbon polymers increases with the monomer’s carbon content.</p>

错误：搜索内容不能为空，请输入英文关键词
错误：关键词超出字数限制，请精简
高级检索

Formation of Luminous Polymerizable Species in Radio Frequency Hydrocarbon Plasma Polymerization in a Tubular Reactor

  • 期刊论文

  • 发表日期：

    2025年2月1日

查看全文
  • Yi-An Chen,
  • Yu-Liang Hung,
  • Ying-Tzu Hsiao,
  • Chun Huang

摘要

Abstract

The distinctive glow features of low-temperature RF ethane, ethylene, and acetylene plasma polymerization and the correlation with plasma-polymerized film characterizations were investigated. It shows that monomers with different chemical structures significantly affect the deposition rate. Increasing system pressure reduces plasma volume and glow discharge intensity, as detected by optical emission spectroscopy (OES), due to a decreased mean free path of electrons in the gas. Different monomers exhibit variations in glow discharge color and intensity, with acetylene’s bond structure producing a higher intensity glow discharge compared to ethylene and ethane. The plasma polymerized film thickness correlates with OES measurements, where higher optical emission intensity results in thicker film growth. In remote regions, limited free radical diffusion leads to generally lower film thickness, which further decreases with increasing pressure. Scanning electron microscopy reveals flat morphologies for ethane and ethylene plasmas, while acetylene plasma shows significant surface morphological change in the glow area. Chemical analysis indicates similar surface functional groups across polymer formation from hydrocarbon monomers, with slight pressure-induced variations in absorption strength. The carbon content of hydrocarbon polymers increases with the monomer’s carbon content.