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<p>The continuous miniaturization of electronic systems has driven manufacturing into the ultra-precision regime, where dimensional tolerances fall below 10 nm, and surface quality approaches atomic smoothness. Conventional machining and lithography are inadequate to meet these demands, prompting the evolution of ultra-precision techniques combining deterministic material removal, atomic-scale deposition, and intelligent process control. This review surveys recent advances in mechanical, optical, chemical, and hybrid approaches for fabricating high-performance electronic, photonic, and quantum components with traceable, uncertainty-aware control across length scales. Developments in ultra-precision machining, laser ion beam processing, atomic-layer manufacturing, and additive–subtractive hybrids are highlighted alongside progress in in situ metrology and AI-based feedback control. The integration of explainable AI, digital twins, and adaptive learning is enabling unprecedented autonomy and repeatability in nanoscale production. Future directions emphasize sustainable, data-driven and quantum-level precision manufacturing to meet the requirements of next-generation semiconductors, photonics and quantum electronics. Attaining Precision-at-scale continues to remain a major grand challenge in the sector.</p>

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Recent advances in ultra-precision manufacturing of electronic, photonic and quantum devices

  • 期刊论文

  • 出版模式：

    开放获取

  • 发表日期：

    2026年3月13日

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  • Jaya Verma,
  • Nader Ameli,
  • Nirmal Kumar Katiyar,
  • Neha Khatri,
  • Rajab Alsayegh,
  • Saurav Goel

摘要

The continuous miniaturization of electronic systems has driven manufacturing into the ultra-precision regime, where dimensional tolerances fall below 10 nm, and surface quality approaches atomic smoothness. Conventional machining and lithography are inadequate to meet these demands, prompting the evolution of ultra-precision techniques combining deterministic material removal, atomic-scale deposition, and intelligent process control. This review surveys recent advances in mechanical, optical, chemical, and hybrid approaches for fabricating high-performance electronic, photonic, and quantum components with traceable, uncertainty-aware control across length scales. Developments in ultra-precision machining, laser ion beam processing, atomic-layer manufacturing, and additive–subtractive hybrids are highlighted alongside progress in in situ metrology and AI-based feedback control. The integration of explainable AI, digital twins, and adaptive learning is enabling unprecedented autonomy and repeatability in nanoscale production. Future directions emphasize sustainable, data-driven and quantum-level precision manufacturing to meet the requirements of next-generation semiconductors, photonics and quantum electronics. Attaining Precision-at-scale continues to remain a major grand challenge in the sector.