Scholarlink

<p>We present a self-traceable grating interferometer (STGI) based on chromium (Cr) atomic transition frequency (<sup>7</sup>S₃ → <sup>7</sup>P₄), achieving direct length traceability to a natural constant. Cr gratings fabricated by atom lithography provide a pitch of 212.7779 nm (4700 lines mm⁻¹) with a measurement uncertainty of 0.0021 nm (<i>k</i> = 1), demonstrating excellent pitch precision. Combining the direct traceability of laser interferometry with the environmental robustness of grating interferometry, the STGI achieves sub-nanometer repeat positioning accuracy. Comparison with a laser interferometer calibrated by the national metrology institute shows excellent consistency, while 1 nm and 0.3 nm displacement tests reveal lower noise and higher sensitivity. This work establishes a novel length traceability chain linking atomic frequency standards to solid gratings, offering a compact, calibration-free, and highly stable approach for precise displacement metrology in advanced manufacturing and nanoscopic instrumentation.</p>

错误：搜索内容不能为空，请输入英文关键词
错误：关键词超出字数限制，请精简
高级检索

Novel grating interferometer self-traceable to Cr atomic transition frequency

  • 期刊论文

  • 出版模式：

    开放获取

  • 发表日期：

    2026年5月22日

查看全文
  • Xiao Deng,
  • Zichao Lin,
  • Guangxu Xiao,
  • Zhangning Xie,
  • Yushu Shi,
  • Jianbo Wang,
  • Lihua Lei,
  • Tao Jin,
  • Dongbai Xue,
  • Yuying Xie,
  • Chunling He,
  • Xiong Dun,
  • Xinbin Cheng,
  • Tongbao Li

摘要

We present a self-traceable grating interferometer (STGI) based on chromium (Cr) atomic transition frequency (7S₃ → 7P₄), achieving direct length traceability to a natural constant. Cr gratings fabricated by atom lithography provide a pitch of 212.7779 nm (4700 lines mm⁻¹) with a measurement uncertainty of 0.0021 nm (k = 1), demonstrating excellent pitch precision. Combining the direct traceability of laser interferometry with the environmental robustness of grating interferometry, the STGI achieves sub-nanometer repeat positioning accuracy. Comparison with a laser interferometer calibrated by the national metrology institute shows excellent consistency, while 1 nm and 0.3 nm displacement tests reveal lower noise and higher sensitivity. This work establishes a novel length traceability chain linking atomic frequency standards to solid gratings, offering a compact, calibration-free, and highly stable approach for precise displacement metrology in advanced manufacturing and nanoscopic instrumentation.