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<p>Chemical vapor deposition (CVD) has enabled two-dimensional (2D) materials and their heterostructures to become promising material platforms for next-generation electronics and photonic devices. However, the robust processing of 2D materials produced by CVD is currently hindered by the lack of a scalable and reliable technique to transfer materials from their growth substrates to target substrates for end applications. Here we introduced an automated system to enable the transfer of CVD-grown 2D materials with robotics by engineering the interfacial adhesion and strain. The developed automated transfer system shows industrial compatibility, as demonstrated by the high production capability (up to 180 wafers per day), reliable transfer quality (with transferred graphene carrier mobilities over 14,000 cm<sup>2 </sup>V<sup>−1</sup> s<sup>−1</sup>), and high uniformity and repeatability of the transferred materials. The developed system also outperforms conventional manual transfer methods in terms of minimizing cost and environmental impact. This automated system could accelerate the research and commercialization of 2D materials in the future.</p><p></p>

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Automated processing and transfer of two-dimensional materials with robotics

  • 期刊论文

  • 发表日期：

    2025年5月23日

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  • Yixuan Zhao,
  • Junhao Liao,
  • Saiyu Bu,
  • Zhaoning Hu,
  • Jingyi Hu,
  • Qi Lu,
  • Mingpeng Shang,
  • Bingbing Guo,
  • Ge Chen,
  • Qian Zhao,
  • Kaicheng Jia,
  • Guorui Wang,
  • Ethan Errington,
  • Qin Xie,
  • Yanfeng Zhang,
  • Miao Guo,
  • Boyang Mao,
  • Li Lin,
  • Zhongfan Liu

摘要

Chemical vapor deposition (CVD) has enabled two-dimensional (2D) materials and their heterostructures to become promising material platforms for next-generation electronics and photonic devices. However, the robust processing of 2D materials produced by CVD is currently hindered by the lack of a scalable and reliable technique to transfer materials from their growth substrates to target substrates for end applications. Here we introduced an automated system to enable the transfer of CVD-grown 2D materials with robotics by engineering the interfacial adhesion and strain. The developed automated transfer system shows industrial compatibility, as demonstrated by the high production capability (up to 180 wafers per day), reliable transfer quality (with transferred graphene carrier mobilities over 14,000 cm2 V−1 s−1), and high uniformity and repeatability of the transferred materials. The developed system also outperforms conventional manual transfer methods in terms of minimizing cost and environmental impact. This automated system could accelerate the research and commercialization of 2D materials in the future.