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<p>Acoustic impedance enables many interesting acoustic applications. However, acoustic impedance for gas sensing is rare and difficult. Here we introduce a micro-nano surface acoustic wave (SAW) chip based on the acoustic impedance effect to achieve ultra-fast and wide-range gas sensing. We theoretically established the relationship between surface load acoustic impedance and SAW attenuation, and analyzed the influence of acoustic impedance on acoustic propagation loss under different gas/humidity media. Experimental measurements reveal that the differences in acoustic impedance generated by different gases trigger different acoustic attenuation, and can achieve wide-range (0–100 <i>v</i>/<i>v</i>%) gas monitoring, with ultra-fast response and recovery speeds reaching sub-second levels (<i>t</i><sub>90</sub> &lt; 1 s, <i>t</i><sub>10</sub> &lt; 0.5 s) and detection limit of ~1 <i>v</i>/<i>v</i>%. This capability can also be perfectly utilized for human respiratory monitoring, accurately reflecting respiratory status, frequency, and intensity. Consequently, the SAW chip based on the acoustic impedance effect provides a new solution for in-situ detection of gas leaks and precise monitoring of human respiration.</p>

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Acoustic impedance-based surface acoustic wave chip for gas leak detection and respiratory monitoring

  • 期刊论文

  • 出版模式：

    开放获取

  • 发表日期：

    2025年2月1日

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  • Baile Cui,
  • Wen Wang,
  • Lina Cheng,
  • Jing Jin,
  • Anyu Hu,
  • Zixuan Ren,
  • Xufeng Xue,
  • Yong Liang

摘要

Acoustic impedance enables many interesting acoustic applications. However, acoustic impedance for gas sensing is rare and difficult. Here we introduce a micro-nano surface acoustic wave (SAW) chip based on the acoustic impedance effect to achieve ultra-fast and wide-range gas sensing. We theoretically established the relationship between surface load acoustic impedance and SAW attenuation, and analyzed the influence of acoustic impedance on acoustic propagation loss under different gas/humidity media. Experimental measurements reveal that the differences in acoustic impedance generated by different gases trigger different acoustic attenuation, and can achieve wide-range (0–100 v/v%) gas monitoring, with ultra-fast response and recovery speeds reaching sub-second levels (t90 < 1 s, t10 < 0.5 s) and detection limit of ~1 v/v%. This capability can also be perfectly utilized for human respiratory monitoring, accurately reflecting respiratory status, frequency, and intensity. Consequently, the SAW chip based on the acoustic impedance effect provides a new solution for in-situ detection of gas leaks and precise monitoring of human respiration.