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<p>This paper presents a proposed tri-axis optomechanical accelerometer integrating a monolithic single-proof-mass MEMS suspension with an engineered metal–insulator–metal (MIM) plasmonic platform. The device utilizes a modified frog-arm spring system, optimized via finite element simulations to provide near-identical peak displacements (<InlineEquation ID="IEq1"><EquationSource Format="TEX">\(\:\approx\:200\:nm\)</EquationSource></InlineEquation>) and mechanical sensitivities (<InlineEquation ID="IEq2"><EquationSource Format="TEX">\(\:{S}_{M}\approx\:100\:nm/g\)</EquationSource></InlineEquation>) within a <InlineEquation ID="IEq3"><EquationSource Format="TEX">\(\:\pm\:2\:g\)</EquationSource></InlineEquation> range, operating across a bandwidth of <InlineEquation ID="IEq4"><EquationSource Format="TEX">\(\:\approx\:473\:Hz\)</EquationSource></InlineEquation>. Structural stability is verified through pre-stressed analysis, showing negligible warpage (<InlineEquation ID="IEq5"><EquationSource Format="TEX">\(\:\approx\:1\:nm\)</EquationSource></InlineEquation>) and a substantial safety factor (<InlineEquation ID="IEq6"><EquationSource Format="TEX">\(\:\approx\:{10}^{4}\)</EquationSource></InlineEquation>), while maintaining minimal axis interference with cross-axis coupling <InlineEquation ID="IEq7"><EquationSource Format="TEX">\(\:&lt;0.2\text{\%}\)</EquationSource></InlineEquation>. The optical transduction, analyzed through finite-difference time-domain (FDTD) methods, employs a Hybrid Plasmonic Waveguide (HPW) configuration to induce a pronounced Fano-type resonance with an insertion loss of <InlineEquation ID="IEq8"><EquationSource Format="TEX">\(\:\approx\:-6.29\:dB\)</EquationSource></InlineEquation> across the visible-to-near-infrared spectrum (<InlineEquation ID="IEq9"><EquationSource Format="TEX">\(\:500-1500\:nm\)</EquationSource></InlineEquation>). By adopting an asymmetric structural architecture, the sensor generates direction-sensitive signatures characterized through a Bidirectional Optical Sensitivity Matrix, which maps nanoscale displacements to simultaneous wavelength and intensity modulation. This framework facilitates the discrimination of acceleration polarities (± X, ±Y, ±Z) and yields a balanced tri-axis Full Scale Normalized Optical Sensitivity (FS-NOS) of <InlineEquation ID="IEq10"><EquationSource Format="TEX">\(\:\approx\:0.002\:{nm}^{-1}\)</EquationSource></InlineEquation>. Systematic noise analysis reveals a NEA of <InlineEquation ID="IEq11"><EquationSource Format="TEX">\(\:\approx\:0.78\:\mu\:g/\sqrt{Hz}\)</EquationSource></InlineEquation>, supporting sub-µg resolution, while the minimum optical resolution for the Y-axis is calculated as <InlineEquation ID="IEq12"><EquationSource Format="TEX">\(\:61.07\:\mu\:g\)</EquationSource></InlineEquation>. Furthermore, a sequential hierarchical decoupling approach is proposed to reconstruct 3D acceleration vectors from superimposed optical outputs. This work establishes a versatile framework for developing high-resolution, all-optical, EMI-immune plasmonic MOEMS tailored for precision inertial sensing.</p>

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A tri-axis optomechanical accelerometer with plasmonic MIM waveguide and structural direction-dependent optical signatures

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  • 发表日期：

    2026年7月4日

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  • Hengameh Farrokhi,
  • Sedighe Babaei Sedaghat

摘要

This paper presents a proposed tri-axis optomechanical accelerometer integrating a monolithic single-proof-mass MEMS suspension with an engineered metal–insulator–metal (MIM) plasmonic platform. The device utilizes a modified frog-arm spring system, optimized via finite element simulations to provide near-identical peak displacements (\(\:\approx\:200\:nm\)) and mechanical sensitivities (\(\:{S}_{M}\approx\:100\:nm/g\)) within a \(\:\pm\:2\:g\) range, operating across a bandwidth of \(\:\approx\:473\:Hz\). Structural stability is verified through pre-stressed analysis, showing negligible warpage (\(\:\approx\:1\:nm\)) and a substantial safety factor (\(\:\approx\:{10}^{4}\)), while maintaining minimal axis interference with cross-axis coupling \(\:<0.2\text{\%}\). The optical transduction, analyzed through finite-difference time-domain (FDTD) methods, employs a Hybrid Plasmonic Waveguide (HPW) configuration to induce a pronounced Fano-type resonance with an insertion loss of \(\:\approx\:-6.29\:dB\) across the visible-to-near-infrared spectrum (\(\:500-1500\:nm\)). By adopting an asymmetric structural architecture, the sensor generates direction-sensitive signatures characterized through a Bidirectional Optical Sensitivity Matrix, which maps nanoscale displacements to simultaneous wavelength and intensity modulation. This framework facilitates the discrimination of acceleration polarities (± X, ±Y, ±Z) and yields a balanced tri-axis Full Scale Normalized Optical Sensitivity (FS-NOS) of \(\:\approx\:0.002\:{nm}^{-1}\). Systematic noise analysis reveals a NEA of \(\:\approx\:0.78\:\mu\:g/\sqrt{Hz}\), supporting sub-µg resolution, while the minimum optical resolution for the Y-axis is calculated as \(\:61.07\:\mu\:g\). Furthermore, a sequential hierarchical decoupling approach is proposed to reconstruct 3D acceleration vectors from superimposed optical outputs. This work establishes a versatile framework for developing high-resolution, all-optical, EMI-immune plasmonic MOEMS tailored for precision inertial sensing.