Channel-engineered GAA FETs: From device to circuit perspective for Angstrom technology nodes
摘要
This work presents a comprehensive device-to-circuit analysis of channel-engineered gate-all-around (GAA) FETs intended for advanced CMOS logic applications, namely the comb-shaped FET (C-FET) and inter-bridge FET (I-FET), benchmarked against a conventional nanosheet FET (NS-FET). All devices are designed according to sub-3-nm IRDS guidelines and evaluated through calibrated 3D TCAD simulations. The results show that the incorporation of vertical inter-bridge (IB) channels in C-FET and I-FET significantly enhances the effective width, leading to notable improvements in drive current, with the I-FET achieving the highest