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<p>This work presents the design and system-level integration of a low-voltage U-shaped meander RF MEMS shunt switch with a K-band phased array antenna for agile and efficient beam steering. The proposed switch achieves a pull-in voltage of 5.3 V, a return loss better than − 30 dB, and an insertion loss as 0.45 dB, ensuring minimal signal degradation across 18–27 GHz. By incorporating the switch into a distributed MEMS transmission line (DMTL) phase shifter network, discrete and reconfigurable phase states are realized, enabling dynamic control of the progressive phase shift between array elements. A four-element series-fed patch array integrated with the MEMS phase shifter demonstrates a steering range of ± 30 °C with low side-lobe levels and high radiation efficiency, confirming its suitability for high-frequency front-end modules. The results confirm that the proposed MEMS-integrated phased array achieves industry-leading low actuation voltage with minimal RF loss, positioning it as a strong candidate for 6G and satellite front-end modules.</p>

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Low-voltage U-shaped RF MEMS shunt switch integration for K-band phased array beam steering

  • 期刊论文

  • 出版模式：

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  • 发表日期：

    2026年3月2日

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  • Y. Anusha,
  • Koushik Guha,
  • Kavicharan Mummaneni,
  • Jagadeesh Thati

摘要

This work presents the design and system-level integration of a low-voltage U-shaped meander RF MEMS shunt switch with a K-band phased array antenna for agile and efficient beam steering. The proposed switch achieves a pull-in voltage of 5.3 V, a return loss better than − 30 dB, and an insertion loss as 0.45 dB, ensuring minimal signal degradation across 18–27 GHz. By incorporating the switch into a distributed MEMS transmission line (DMTL) phase shifter network, discrete and reconfigurable phase states are realized, enabling dynamic control of the progressive phase shift between array elements. A four-element series-fed patch array integrated with the MEMS phase shifter demonstrates a steering range of ± 30 °C with low side-lobe levels and high radiation efficiency, confirming its suitability for high-frequency front-end modules. The results confirm that the proposed MEMS-integrated phased array achieves industry-leading low actuation voltage with minimal RF loss, positioning it as a strong candidate for 6G and satellite front-end modules.