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<p>The present study investigates the synthesis of mixed cobalt manganese oxide coating for Solid Oxide Cell (SOC) interconnect application using DLI-MOCVD (Direct Liquid Injection-Metal Oxide Chemical Vapor Deposition). The possibility to control the coating thickness and composition by injecting a mixed solution of Co(acac)<sub>3</sub> and Mn(acac)<sub>3</sub> precursors is demonstrated. Various oxide compositions from Mn<sub>x</sub>Co<sub>1-x</sub>O to Mn<sub>x</sub>Co<sub>3-x</sub>O<sub>4</sub> are synthesized. An acceptable homogeneity in terms of thickness and composition is possible over 25&#xa0;cm along a tubular reactor which makes this process suitable for industrial application.</p>

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Mixed Co-Mn oxide coatings synthetized by DLI-MOCVD for SOC interconnect a parametric study for composition and homogeneity control

  • 期刊论文

  • 出版模式：

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  • 发表日期：

    2025年11月14日

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  • R. Chanson,
  • F. Miserque,
  • F. Schuster,
  • F. Rouillard

摘要

The present study investigates the synthesis of mixed cobalt manganese oxide coating for Solid Oxide Cell (SOC) interconnect application using DLI-MOCVD (Direct Liquid Injection-Metal Oxide Chemical Vapor Deposition). The possibility to control the coating thickness and composition by injecting a mixed solution of Co(acac)3 and Mn(acac)3 precursors is demonstrated. Various oxide compositions from MnxCo1-xO to MnxCo3-xO4 are synthesized. An acceptable homogeneity in terms of thickness and composition is possible over 25 cm along a tubular reactor which makes this process suitable for industrial application.