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<p>A theoretical study was conducted on the free vibration and forced vibration behaviors of a piezoelectric bulk acoustic mass sensor featuring a c-axis tilted ZnO thin film on silicon using piezoelectric elasticity theory. The purpose is to establish the relationship between c-axis inclination angle and sensor performance. It operates in either thickness-extensional mode or thickness‐shear mode. The inclination angle of the c‐axis is intricately connected to the operating modes, frequency characteristics, and output admittance spectrum. Key results show: (1) Characteristic distributions of extensional and shear displacements across the thickness, and (2) Numerical simulations revealing distinct admittance spectrum patterns for different angles. Furthermore, mass-loading effects on resonant frequency shifts were quantified across different inclination angles. In conclusion, strategic control of the c-axis tilt angle enables precise optimization of resonant modes and mass sensitivity—critically motivated by the need for tunable high-sensitivity sensors in biochemical detection—providing critical design guidelines for enhanced acoustic sensors.</p>

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A vibration analysis of an acoustic mass sensor structure with a c-axis tilted ZnO thin film based on silicon

  • 期刊论文

  • 出版模式：

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  • 发表日期：

    2025年10月28日

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  • Jing Liu,
  • Xiangyang Li,
  • Xiaomin Li

摘要

A theoretical study was conducted on the free vibration and forced vibration behaviors of a piezoelectric bulk acoustic mass sensor featuring a c-axis tilted ZnO thin film on silicon using piezoelectric elasticity theory. The purpose is to establish the relationship between c-axis inclination angle and sensor performance. It operates in either thickness-extensional mode or thickness‐shear mode. The inclination angle of the c‐axis is intricately connected to the operating modes, frequency characteristics, and output admittance spectrum. Key results show: (1) Characteristic distributions of extensional and shear displacements across the thickness, and (2) Numerical simulations revealing distinct admittance spectrum patterns for different angles. Furthermore, mass-loading effects on resonant frequency shifts were quantified across different inclination angles. In conclusion, strategic control of the c-axis tilt angle enables precise optimization of resonant modes and mass sensitivity—critically motivated by the need for tunable high-sensitivity sensors in biochemical detection—providing critical design guidelines for enhanced acoustic sensors.