<p>The pursuit of non-volatile memory with program speeds below one nanosecond, beyond the capabilities of non-volatile flash and high-speed volatile static random-access memory, remains a longstanding challenge in the field of memory technology<sup><CitationRef CitationID="CR1">1</CitationRef></sup>. Utilizing fundamental physics innovation enabled by advanced materials, series of emerging memories<sup><CitationRef AdditionalCitationIDS="CR3 CR4" CitationID="CR2">2</CitationRef>–<CitationRef CitationID="CR5">5</CitationRef></sup> are being developed to overcome the speed bottleneck of non-volatile memory. As the most extensively applied non-volatile memory, the speed of flash is limited by the low efficiency of the electric-field-assisted program, with reported speeds<sup><CitationRef AdditionalCitationIDS="CR7 CR8 CR9" CitationID="CR6">6</CitationRef>–<CitationRef CitationID="CR10">10</CitationRef></sup> much slower than sub-one nanosecond. Here we report a two-dimensional Dirac graphene-channel flash memory based on a two-dimensional-enhanced hot-carrier-injection mechanism, supporting both electron and hole injection. The Dirac channel flash shows a program speed of 400 picoseconds, non-volatile storage and robust endurance over 5.5 × 10<sup>6</sup> cycles. Our results confirm that the thin-body channel can optimize the horizontal electric-field (<i>E</i><sub><i>y</i></sub>) distribution, and the improved <i>E</i><sub><i>y</i></sub>-assisted program efficiency increases the injection current to 60.4 pA μm<sup>−1</sup> at |<i>V</i><sub>DS</sub>| = 3.7 V. We also find that the two-dimensional semiconductor tungsten diselenide has two-dimensional-enhanced hot-hole injection, but with different injection behaviour. This work demonstrates that the speed of non-volatile flash memory can exceed that of the fastest volatile static random-access memory with the same channel length.</p>

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Subnanosecond flash memory enabled by 2D-enhanced hot-carrier injection

  • Yutong Xiang,
  • Chong Wang,
  • Chunsen Liu,
  • Tanjun Wang,
  • Yongbo Jiang,
  • Yang Wang,
  • Shuiyuan Wang,
  • Peng Zhou

摘要

The pursuit of non-volatile memory with program speeds below one nanosecond, beyond the capabilities of non-volatile flash and high-speed volatile static random-access memory, remains a longstanding challenge in the field of memory technology1. Utilizing fundamental physics innovation enabled by advanced materials, series of emerging memories25 are being developed to overcome the speed bottleneck of non-volatile memory. As the most extensively applied non-volatile memory, the speed of flash is limited by the low efficiency of the electric-field-assisted program, with reported speeds610 much slower than sub-one nanosecond. Here we report a two-dimensional Dirac graphene-channel flash memory based on a two-dimensional-enhanced hot-carrier-injection mechanism, supporting both electron and hole injection. The Dirac channel flash shows a program speed of 400 picoseconds, non-volatile storage and robust endurance over 5.5 × 106 cycles. Our results confirm that the thin-body channel can optimize the horizontal electric-field (Ey) distribution, and the improved Ey-assisted program efficiency increases the injection current to 60.4 pA μm−1 at |VDS| = 3.7 V. We also find that the two-dimensional semiconductor tungsten diselenide has two-dimensional-enhanced hot-hole injection, but with different injection behaviour. This work demonstrates that the speed of non-volatile flash memory can exceed that of the fastest volatile static random-access memory with the same channel length.