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<p>Van der Waals (vdW) materials have emerged as a promising platform for next-generation nanophotonics and optoelectronics. However, employing vdW materials as a core photonic integration platform, rather than as passive or active overlays on conventional silicon-based platforms, remains challenging, leaving their full potential untapped. Here we develop a nanofabrication strategy that enables high-resolution patterning across a broad range of vdW materials, including insulators, semiconductors, ferroelectrics and their heterostructures, and we show that they can be used as the intrinsic platform for low-loss microcavity nonlinear photonic devices such as microdisks, photonic crystals and metasurfaces. We demonstrate vdW microdisk resonators with quality (<i>Q</i>) factors exceeding 10<sup>6</sup>. Such <i>Q</i> factors enable efficient continuous-wave nonlinear optical processes, including second-harmonic generation, sum-frequency generation and optical parametric amplification, with full free-spectral-range thermal tunability. These results position vdW materials as key material building blocks for next-generation integrated photonics and optoelectronics.</p>

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All-van der Waals microcavities for low-loss nonlinear photonics

  • 期刊论文

  • 出版模式：

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  • 发表日期：

    2026年4月13日

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  • Zhi-Yan Wang,
  • Xiaoqi Cui,
  • Andreas C. Liapis,
  • Hao-Ran Shao,
  • Xu Cheng,
  • Jingnan Yang,
  • Nianze Shang,
  • Weizhe Zhang,
  • Henri Kaaripuro,
  • Juan C. Arias Muñoz,
  • Kaifeng Lin,
  • Wenjing Liu,
  • Kaihui Liu,
  • Qihuang Gong,
  • Zhipei Sun,
  • Yun-Feng Xiao

摘要

Van der Waals (vdW) materials have emerged as a promising platform for next-generation nanophotonics and optoelectronics. However, employing vdW materials as a core photonic integration platform, rather than as passive or active overlays on conventional silicon-based platforms, remains challenging, leaving their full potential untapped. Here we develop a nanofabrication strategy that enables high-resolution patterning across a broad range of vdW materials, including insulators, semiconductors, ferroelectrics and their heterostructures, and we show that they can be used as the intrinsic platform for low-loss microcavity nonlinear photonic devices such as microdisks, photonic crystals and metasurfaces. We demonstrate vdW microdisk resonators with quality (Q) factors exceeding 106. Such Q factors enable efficient continuous-wave nonlinear optical processes, including second-harmonic generation, sum-frequency generation and optical parametric amplification, with full free-spectral-range thermal tunability. These results position vdW materials as key material building blocks for next-generation integrated photonics and optoelectronics.