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<p>Active metasurfaces enable dynamic control of light for applications in beam steering, pixelated holography, and adaptive optics, but demonstrations of two-dimensional electrically addressable arrays have so far been limited. Here we introduce a scalable two-dimensional architecture based on phase-change materials integrated metasurfaces and apply it to realize the first transmissive mid-infrared amplitude-only spatial light modulator. The device is fabricated through standard silicon photonic foundry processing combined with backend-of-line integration and employs multilayer backend metal interconnects to implement a crossbar addressing scheme. Each pixel is integrated with a silicon diode selector to suppress sneak-path currents, a feature essential for scaling to large arrays. The result establishes a foundry-compatible route to high-density, large-area active metasurfaces with independently tunable pixels.</p>

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Two-dimensional pixel-level addressable mid-infrared metasurface spatial light modulator

  • 期刊论文

  • 出版模式：

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  • 发表日期：

    2026年7月7日

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  • Cosmin-Constantin Popescu,
  • Maarten Robbert Anton Peters,
  • Oleg Maksimov,
  • Harish B. Bhandari,
  • Rashi Sharma,
  • Kathleen A. Richardson,
  • Arka Majumdar,
  • Hyun Jung Kim,
  • Rui Chen,
  • Khoi Phuong Dao,
  • Luigi Ranno,
  • Brian Mills,
  • Dennis M. Calahan,
  • Tian Gu,
  • Juejun Hu

摘要

Active metasurfaces enable dynamic control of light for applications in beam steering, pixelated holography, and adaptive optics, but demonstrations of two-dimensional electrically addressable arrays have so far been limited. Here we introduce a scalable two-dimensional architecture based on phase-change materials integrated metasurfaces and apply it to realize the first transmissive mid-infrared amplitude-only spatial light modulator. The device is fabricated through standard silicon photonic foundry processing combined with backend-of-line integration and employs multilayer backend metal interconnects to implement a crossbar addressing scheme. Each pixel is integrated with a silicon diode selector to suppress sneak-path currents, a feature essential for scaling to large arrays. The result establishes a foundry-compatible route to high-density, large-area active metasurfaces with independently tunable pixels.