<p>Electronic-grade (EG) C<sub>3</sub>H<sub>6</sub> represents an essential feedstock for semiconductor manufacturing, yet its purification remains energy-intensive due to the difficulty in removing trace C<sub>3</sub>H<sub>8</sub> impurities via conventional cryogenic distillation, which requires high pressure and low temperature operation conditions. In this study, we demonstrate efficient C<sub>3</sub>H<sub>6</sub>/C<sub>3</sub>H<sub>8</sub> separation under practical operation conditions using a ZIF-8 membrane prepared at near-freezing temperature. Gas permeation results show that the C<sub>3</sub>H<sub>6</sub>/C<sub>3</sub>H<sub>8</sub> separation factor (SF) increases as temperature decreases, reaching 607 at −40 °C and remaining independent of operating pressure. Under industry-relevant conditions (−20 °C, 3 bar), the membrane achieved a SF of 362 with C<sub>3</sub>H<sub>6</sub> flux of 135.3× 10<sup>-5 </sup>mol m<sup>-2</sup> s<sup>-1</sup>, enabling one-step reduction of C<sub>3</sub>H<sub>8</sub> from 2998 ppm to 8 ppm and complete removal of C<sub>4</sub>H<sub>10</sub> from polymer-grade C<sub>3</sub>H<sub>6</sub> feed. Adsorption-diffusion analysis reveals that enhanced separation at subfreezing temperature originates from increased diffusion selectivity caused by contraction and rigidification of ZIF-8 window. Process analysis further shows that integrating the membrane with distillation column can upgrade 99.5% C<sub>3</sub>H<sub>6</sub> to ~5 N purity while reducing operating cost by 56.57% (1.34 US$ kg<sup>-1</sup> EG C<sub>3</sub>H<sub>6</sub>).</p>

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ZIF-8 membrane-based cryo-stripping of trace impurities towards electronic grade C3H6 production

  • Kunpeng Yu,
  • Yachao Dong,
  • Taotao Ji,
  • Jiaxu Liu,
  • Shiya Gu,
  • Jianzhong Yin,
  • Xinyu He,
  • Bin Zheng,
  • Jiachen Wang,
  • Yunlei Gao,
  • Guillaume Maurin,
  • Yi Liu

摘要

Electronic-grade (EG) C3H6 represents an essential feedstock for semiconductor manufacturing, yet its purification remains energy-intensive due to the difficulty in removing trace C3H8 impurities via conventional cryogenic distillation, which requires high pressure and low temperature operation conditions. In this study, we demonstrate efficient C3H6/C3H8 separation under practical operation conditions using a ZIF-8 membrane prepared at near-freezing temperature. Gas permeation results show that the C3H6/C3H8 separation factor (SF) increases as temperature decreases, reaching 607 at −40 °C and remaining independent of operating pressure. Under industry-relevant conditions (−20 °C, 3 bar), the membrane achieved a SF of 362 with C3H6 flux of 135.3× 10-5 mol m-2 s-1, enabling one-step reduction of C3H8 from 2998 ppm to 8 ppm and complete removal of C4H10 from polymer-grade C3H6 feed. Adsorption-diffusion analysis reveals that enhanced separation at subfreezing temperature originates from increased diffusion selectivity caused by contraction and rigidification of ZIF-8 window. Process analysis further shows that integrating the membrane with distillation column can upgrade 99.5% C3H6 to ~5 N purity while reducing operating cost by 56.57% (1.34 US$ kg-1 EG C3H6).