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<p>Flexible detectors have gained growing research interest due to their promising applications in optical sensing and imaging systems with a broad field-of-view. However, most research have focused on conventional photodiodes of which the responsivity are limited at short-wave infrared due to the absence of internal multiplication gain. Here we have realized and demonstrated flexible thin-film InGaAs/InAlAs avalanche photodiodes on a mica substrate for short-wave infrared detection. This achievement was made possible by the development and implementation of a low-temperature bonding and well-optimized fabrication process. Our devices exhibit promising characteristics, including low dark current, good responsivity, and high multiplication gain. Even when subjected to bending conditions, the avalanche photodiodes maintain their general performance. The advent of such flexible InGaAs avalanche photodiodes with reliable and promising performance enables a significantly broader range of potential applications.</p>

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Flexible InGaAs/InAlAs avalanche photodiodes for short-wave infrared detection

  • 期刊论文

  • 出版模式：

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  • 发表日期：

    2025年10月23日

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  • Jishen Zhang,
  • Rui Shao,
  • Haiwen Xu,
  • Kian Hua Tan,
  • Satrio Wicaksono,
  • Qiwen Kong,
  • Gong Zhang,
  • Chen Sun,
  • Yue Chen,
  • Aaron Danner,
  • Soon-Fatt Yoon,
  • Xiao Gong

摘要

Flexible detectors have gained growing research interest due to their promising applications in optical sensing and imaging systems with a broad field-of-view. However, most research have focused on conventional photodiodes of which the responsivity are limited at short-wave infrared due to the absence of internal multiplication gain. Here we have realized and demonstrated flexible thin-film InGaAs/InAlAs avalanche photodiodes on a mica substrate for short-wave infrared detection. This achievement was made possible by the development and implementation of a low-temperature bonding and well-optimized fabrication process. Our devices exhibit promising characteristics, including low dark current, good responsivity, and high multiplication gain. Even when subjected to bending conditions, the avalanche photodiodes maintain their general performance. The advent of such flexible InGaAs avalanche photodiodes with reliable and promising performance enables a significantly broader range of potential applications.