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<p>Nonvolatile photonic integrated circuits employing phase change materials have relied either on optical switching with precise multi-level control but poor scalability or electrical switching with seamless integration and scalability but mostly limited to a binary response. The main limitation of the latter is relying on stochastic nucleation, since its random nature hinders the repeatability of multi-level states. Here, we show engineered waveguide-integrated microheaters to achieve precise spatial control of the temperature profile (i.e., hotspot) and, thus, switch deterministic areas of an embedded phase change material. We experimentally demonstrate this concept using a variety of foundry-processed doped-silicon microheaters on a silicon-on-insulator platform featuring Sb<sub>2</sub>Se<sub>3</sub> or Ge<sub>2</sub>Sb<sub>2</sub>Se<sub>4</sub>Te and achieve 27 cycles with 7 repeatable levels each. We further characterize the microheaters’ response using Transient Thermoreflectance Imaging. Our microstructure engineering concept demonstrates the evasive repeatable multi-levels employing a single microheater device, which is necessary for robust and energy-efficient reprogrammable phase change photonics in analog processing and computing.</p>

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Microheater hotspot engineering for spatially resolved and repeatable multi-level switching in foundry-processed phase change silicon photonics

  • 期刊论文

  • 出版模式：

    开放获取

  • 发表日期：

    2025年5月9日

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  • Hongyi Sun,
  • Chuanyu Lian,
  • Francis Vásquez-Aza,
  • Sadra Rahimi Kari,
  • Yi-Siou Huang,
  • Alessandro Restelli,
  • Steven A. Vitale,
  • Ichiro Takeuchi,
  • Juejun Hu,
  • Nathan Youngblood,
  • Georges Pavlidis,
  • Carlos A. Ríos Ocampo

摘要

Nonvolatile photonic integrated circuits employing phase change materials have relied either on optical switching with precise multi-level control but poor scalability or electrical switching with seamless integration and scalability but mostly limited to a binary response. The main limitation of the latter is relying on stochastic nucleation, since its random nature hinders the repeatability of multi-level states. Here, we show engineered waveguide-integrated microheaters to achieve precise spatial control of the temperature profile (i.e., hotspot) and, thus, switch deterministic areas of an embedded phase change material. We experimentally demonstrate this concept using a variety of foundry-processed doped-silicon microheaters on a silicon-on-insulator platform featuring Sb2Se3 or Ge2Sb2Se4Te and achieve 27 cycles with 7 repeatable levels each. We further characterize the microheaters’ response using Transient Thermoreflectance Imaging. Our microstructure engineering concept demonstrates the evasive repeatable multi-levels employing a single microheater device, which is necessary for robust and energy-efficient reprogrammable phase change photonics in analog processing and computing.