Scholarlink

<p>Resonant nanoelectromechanical systems (NEMS) based on two-dimensional (2D) materials exhibit excellent resonance properties such as a large tuning range, ultralow power, and large dynamic range, leading to broad potential applications in sensing and signal processing. However, scalable fabrication of high-performance 2D NEMS arrays, particularly those with individually addressable electronic control, remains challenging and underexplored. Here, we report a mass transfer printing (MTP) method for the fabrication of large-scale electronically-independent molybdenum disulfide (MoS<sub>2</sub>) NEMS resonators with regular isolation spacing. MoS<sub>2</sub> is precisely torn at the edges of polymer protrusions by the surface tension of auxiliary liquid, followed by dry-transfer to the pre-patterned substrate with microtrenches and electrodes. The MTP technique avoids lithographic processes that could lead to collapsing or failure of suspended 2D materials while obtaining electronically independent devices. Characterization of 84 monolayer MoS<sub>2</sub> NEMS resonators demonstrates maintained material quality after transfer, structural integrity, highly tunable resonance frequencies in very-high-frequency (VHF) band, consistent tuning trend of quality (<i>Q</i>) factors, and significant signal-to-noise ratios (<i>SNRs</i>). Independent AC voltage excitation and DC voltage sweeping on different resonators confirm individual electronic control without crosstalk even for neighboring resonators. Furthermore, we design and experimentally demonstrate a functional decimal-to-binary converter building block using adjacent, electrically isolated resonators on a single chip, using gate voltage as input and amplitude at the specific frequency as output. The MTP-fabricated array of independently-addressable MoS<sub>2</sub> resonators advances the large-scale integration of 2D NEMS devices, offering a straightforward and promising pathway for a plethora of applications built upon such device platform.</p><p></p>

错误：搜索内容不能为空，请输入英文关键词
错误：关键词超出字数限制，请精简
高级检索

Functional 2D MoS2 NEMS resonator array with independent electronic tunability based on mass transfer printing

  • 期刊论文

  • 出版模式：

    开放获取

  • 发表日期：

    2026年1月8日

查看全文
  • Zuheng Liu,
  • Lingyu Zhu,
  • Shuai Yuan,
  • Yijian Zhang,
  • Pengcheng Zhang,
  • Zhenggang Cai,
  • Liwei Liu,
  • Rui Yang

摘要

Resonant nanoelectromechanical systems (NEMS) based on two-dimensional (2D) materials exhibit excellent resonance properties such as a large tuning range, ultralow power, and large dynamic range, leading to broad potential applications in sensing and signal processing. However, scalable fabrication of high-performance 2D NEMS arrays, particularly those with individually addressable electronic control, remains challenging and underexplored. Here, we report a mass transfer printing (MTP) method for the fabrication of large-scale electronically-independent molybdenum disulfide (MoS2) NEMS resonators with regular isolation spacing. MoS2 is precisely torn at the edges of polymer protrusions by the surface tension of auxiliary liquid, followed by dry-transfer to the pre-patterned substrate with microtrenches and electrodes. The MTP technique avoids lithographic processes that could lead to collapsing or failure of suspended 2D materials while obtaining electronically independent devices. Characterization of 84 monolayer MoS2 NEMS resonators demonstrates maintained material quality after transfer, structural integrity, highly tunable resonance frequencies in very-high-frequency (VHF) band, consistent tuning trend of quality (Q) factors, and significant signal-to-noise ratios (SNRs). Independent AC voltage excitation and DC voltage sweeping on different resonators confirm individual electronic control without crosstalk even for neighboring resonators. Furthermore, we design and experimentally demonstrate a functional decimal-to-binary converter building block using adjacent, electrically isolated resonators on a single chip, using gate voltage as input and amplitude at the specific frequency as output. The MTP-fabricated array of independently-addressable MoS2 resonators advances the large-scale integration of 2D NEMS devices, offering a straightforward and promising pathway for a plethora of applications built upon such device platform.