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<p>This study presents the design and fabrication of a ruthenium dioxide (RuO<sub>2</sub>) nanosheets-functionalized tin dioxide (SnO<sub>2</sub>) thin-film gas sensor integrated with a microheater in a suspended membrane structure. The RuO<sub>2</sub> nanosheets are synthesized via an intercalation-driven exfoliation process and subsequently deposited onto a sputtered SnO<sub>2</sub> thin film. Due to the catalytic properties and high surface-to-volume ratio of RuO<sub>2</sub> nanosheets, the functionalized sensor demonstrates a 337% increase in response (<i>R</i><sub>air</sub>/<i>R</i><sub>gas</sub>) to 10 ppm ethanol compared to pristine SnO<sub>2</sub> thin film. The sensor achieves sensitive detection from a few parts-per-million (ppm) down to several parts-per-billion (ppb) concentrations of ethanol. Evaluations under varied humidity conditions, as well as selectivity and 28-day stability tests, demonstrate that the RuO<sub>2</sub> nanosheets-functionalized sensor maintains reliable performance. These results highlight its potential as a sensitive, selective, and low-power solution for ethanol gas detection. Furthermore, the sensor successfully tracks breath alcohol concentration in real-time through controlled alcohol intake experiments, demonstrating its feasibility for practical breath alcohol detection.</p>

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Ultra-sensitive ethanol detection using a chemiresistive SnO2 thin-film gas sensor functionalized with RuO2 nanosheets

  • 期刊论文

  • 出版模式：

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  • 发表日期：

    2025年11月7日

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  • Wonkeun Park,
  • Yunsung Kang,
  • Xiaoyan Jin,
  • Dongseok Lee,
  • Seong-Ju Hwang,
  • Jongbaeg Kim

摘要

This study presents the design and fabrication of a ruthenium dioxide (RuO2) nanosheets-functionalized tin dioxide (SnO2) thin-film gas sensor integrated with a microheater in a suspended membrane structure. The RuO2 nanosheets are synthesized via an intercalation-driven exfoliation process and subsequently deposited onto a sputtered SnO2 thin film. Due to the catalytic properties and high surface-to-volume ratio of RuO2 nanosheets, the functionalized sensor demonstrates a 337% increase in response (Rair/Rgas) to 10 ppm ethanol compared to pristine SnO2 thin film. The sensor achieves sensitive detection from a few parts-per-million (ppm) down to several parts-per-billion (ppb) concentrations of ethanol. Evaluations under varied humidity conditions, as well as selectivity and 28-day stability tests, demonstrate that the RuO2 nanosheets-functionalized sensor maintains reliable performance. These results highlight its potential as a sensitive, selective, and low-power solution for ethanol gas detection. Furthermore, the sensor successfully tracks breath alcohol concentration in real-time through controlled alcohol intake experiments, demonstrating its feasibility for practical breath alcohol detection.