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<p>Miniaturized spectrometers for Raman spectroscopy have the potential to open up a new chapter in sensing. Raman spectroscopy is essential for material characterization and biomedical diagnostics, however, its weak signal and the need for sub-nanometer resolution pose challenges. Conventional spectrometers, with footprints proportional to optical throughput and resolution, are difficult to integrate into compact devices such as wearables. Waveguide-based Fourier Transform Spectrometers (FTS) enable compact spectrometers, and multi-aperture designs can achieve high throughput for applications such as Raman spectroscopy; however, experimental research in this domain remains limited. In this work, we present a multi-aperture SiN waveguide-based FTS overcoming these limitations and enabling Raman spectroscopy of isopropyl alcohol, glucose, Paracetamol, and Ibuprofen with enhanced throughput. Our spectrometer chip, fabricated on a 200 mm SiN wafer, with 160 edge-coupled waveguide apertures connected to an array of ultra-compact interferometers and a small footprint of just 1.6 mm × 3.2 mm, achieves a spectral range of 40 nm and a resolution of 0.5 nm. Experimental results demonstrate that the least absolute shrinkage and selection operator (LASSO) regression significantly enhances Raman spectrum reconstruction. Our work on waveguide-based spectrometry paves the way for integrating accurate and compact Raman sensors into consumer electronics and space exploration instruments.</p>

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Scalable miniature on-chip Fourier transform spectrometer for Raman spectroscopy

  • 期刊论文

  • 出版模式：

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  • 发表日期：

    2025年5月30日

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  • Sarp Kerman,
  • Xiao Luo,
  • Zuoqin Ding,
  • Zhewei Zhang,
  • Zhuo Deng,
  • Xiaofei Qin,
  • Yuran Xu,
  • Shuhua Zhai,
  • Chang Chen

摘要

Miniaturized spectrometers for Raman spectroscopy have the potential to open up a new chapter in sensing. Raman spectroscopy is essential for material characterization and biomedical diagnostics, however, its weak signal and the need for sub-nanometer resolution pose challenges. Conventional spectrometers, with footprints proportional to optical throughput and resolution, are difficult to integrate into compact devices such as wearables. Waveguide-based Fourier Transform Spectrometers (FTS) enable compact spectrometers, and multi-aperture designs can achieve high throughput for applications such as Raman spectroscopy; however, experimental research in this domain remains limited. In this work, we present a multi-aperture SiN waveguide-based FTS overcoming these limitations and enabling Raman spectroscopy of isopropyl alcohol, glucose, Paracetamol, and Ibuprofen with enhanced throughput. Our spectrometer chip, fabricated on a 200 mm SiN wafer, with 160 edge-coupled waveguide apertures connected to an array of ultra-compact interferometers and a small footprint of just 1.6 mm × 3.2 mm, achieves a spectral range of 40 nm and a resolution of 0.5 nm. Experimental results demonstrate that the least absolute shrinkage and selection operator (LASSO) regression significantly enhances Raman spectrum reconstruction. Our work on waveguide-based spectrometry paves the way for integrating accurate and compact Raman sensors into consumer electronics and space exploration instruments.