<p>The rapid advancement of the thin-film lithium niobate (LiNbO<sub>3</sub>) platform has established it as a premier choice for high-performance photonics integrated circuits. However, the scalability and cost-efficiency of this platform are hindered by the reliance on chip-level fabrication and integration for passive and active components, necessitating a robust wafer-level LiNbO<sub>3</sub> heterogeneous integration platform. Despite its critical role in enabling ultrahigh-speed optical interconnects, as well as optical mmWave/THz sensing and communication, the realization of ultrahigh-speed photodiodes and optical coherent receivers on the LiNbO₃ platform remains an unresolved challenge. This is primarily due to the challenges associated with the large-scale integration of direct-bandgap materials. To address these challenges, we have developed a scalable, high-speed InP-LiNbO₃ wafer-level heterogeneous integration platform. This platform facilitates the fabrication of ultrahigh-speed photodiodes with a bandwidth of 140 GHz, capable of receiving high-quality 100-Gbaud pulse amplitude modulation (PAM4) signals. Moreover, we demonstrate a seven-channel, single-polarization I–Q coherent receiver chip with an aggregate receiving capacity of 3.584 Tbit s<sup>-1</sup>. This coherent receiver exhibits a balanced detection bandwidth of 60 GHz and a common mode rejection ratio (CMRR) exceeding 20 dB. It achieves receiving capacities of 600 Gbit s<sup>-1</sup> λ<sup>-1</sup> with a 100-Gbaud 64-QAM signal and 512 Gbit s<sup>-1</sup> λ<sup>-1</sup> with a 128-Gbaud 16-QAM signal. Furthermore, energy consumption as low as 9.6 fJ bit<sup>-1</sup> and 13.5 fJ bit<sup>-1</sup> is achieved for 200 Gbit s<sup>-1</sup> and 400 Gbit s<sup>-1</sup> capacities, respectively. Our work provides a viable pathway toward enabling Pbps hyperscale data center interconnects, as well as optical mmWave/THz sensing and communication.</p>

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A 3.584 Tbps coherent receiver chip on InP-LiNbO3 wafer-level integration platform

  • Xiaojun Xie,
  • Chao Wei,
  • Xingchen He,
  • Yake Chen,
  • Chenghao Wang,
  • Jihui Sun,
  • Lin Jiang,
  • Jia Ye,
  • Xihua Zou,
  • Wei Pan,
  • Lianshan Yan

摘要

The rapid advancement of the thin-film lithium niobate (LiNbO3) platform has established it as a premier choice for high-performance photonics integrated circuits. However, the scalability and cost-efficiency of this platform are hindered by the reliance on chip-level fabrication and integration for passive and active components, necessitating a robust wafer-level LiNbO3 heterogeneous integration platform. Despite its critical role in enabling ultrahigh-speed optical interconnects, as well as optical mmWave/THz sensing and communication, the realization of ultrahigh-speed photodiodes and optical coherent receivers on the LiNbO₃ platform remains an unresolved challenge. This is primarily due to the challenges associated with the large-scale integration of direct-bandgap materials. To address these challenges, we have developed a scalable, high-speed InP-LiNbO₃ wafer-level heterogeneous integration platform. This platform facilitates the fabrication of ultrahigh-speed photodiodes with a bandwidth of 140 GHz, capable of receiving high-quality 100-Gbaud pulse amplitude modulation (PAM4) signals. Moreover, we demonstrate a seven-channel, single-polarization I–Q coherent receiver chip with an aggregate receiving capacity of 3.584 Tbit s-1. This coherent receiver exhibits a balanced detection bandwidth of 60 GHz and a common mode rejection ratio (CMRR) exceeding 20 dB. It achieves receiving capacities of 600 Gbit s-1 λ-1 with a 100-Gbaud 64-QAM signal and 512 Gbit s-1 λ-1 with a 128-Gbaud 16-QAM signal. Furthermore, energy consumption as low as 9.6 fJ bit-1 and 13.5 fJ bit-1 is achieved for 200 Gbit s-1 and 400 Gbit s-1 capacities, respectively. Our work provides a viable pathway toward enabling Pbps hyperscale data center interconnects, as well as optical mmWave/THz sensing and communication.