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<p>A stacked metamaterial MEMS (meta-MEMS) chip is proposed, which can perfectly absorb electromagnetic waves, convert them into mechanical energy, drive movement of the optical micro-reflectors array, and detect millimeter waves. It is equivalent to using visible light to image a millimeter wave. The meta-MEMS adopts the design of upper and lower chip separation and then stacking to achieve the “dielectric-resonant-air-ground” structure, reduce the thickness of the metamaterial and MEMS structures, and improve the performance of millimeter wave imaging. For verification, we designed and prepared a 94 GHz meta-MEMS focal plane array chip, in which the sum of the thickness of the metamaterial and MEMS structures is only 1/2500 wavelength, the pixel size is less than 1/3 wavelength, but the absorption rate is as high as 99.8%. Moreover, a light readout module was constructed to test the millimeter wave imaging performance. The results show that the response speed can reach 144 Hz and the lens-less imaging resolution is 1.5 mm.</p>

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Using light to image millimeter wave based on stacked meta-MEMS chip

  • 期刊论文

  • 出版模式：

    开放获取

  • 发表日期：

    2025年1月22日

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  • Han Wang,
  • Zhigang Wang,
  • Cheng Gong,
  • Xinyu Li,
  • Tiansheng Cui,
  • Huiqi Jiang,
  • Minghui Deng,
  • Bo Yan,
  • Weiwei Liu

摘要

A stacked metamaterial MEMS (meta-MEMS) chip is proposed, which can perfectly absorb electromagnetic waves, convert them into mechanical energy, drive movement of the optical micro-reflectors array, and detect millimeter waves. It is equivalent to using visible light to image a millimeter wave. The meta-MEMS adopts the design of upper and lower chip separation and then stacking to achieve the “dielectric-resonant-air-ground” structure, reduce the thickness of the metamaterial and MEMS structures, and improve the performance of millimeter wave imaging. For verification, we designed and prepared a 94 GHz meta-MEMS focal plane array chip, in which the sum of the thickness of the metamaterial and MEMS structures is only 1/2500 wavelength, the pixel size is less than 1/3 wavelength, but the absorption rate is as high as 99.8%. Moreover, a light readout module was constructed to test the millimeter wave imaging performance. The results show that the response speed can reach 144 Hz and the lens-less imaging resolution is 1.5 mm.