Synthesis of spherical AlN particles with tunable sizes by controlling CRN parameters and starting materials
摘要
This study investigates the synthesis of spherical AlN particles (1–10 μm) through carbothermal reduction-nitridation (CRN) of α-Al2O3 powder for use as a filler in thermal interface materials (TIMs). The effects of various parameters, such as Al2O3 particle size, nitridation promoter selection, CRN temperature, and N2 pressure, are examined to increase the size variability of spherical AlN particles. Ca-containing compounds are found to improve AlN conversion efficiency significantly. Notably, Ca(NO3)2 is more effective for producing fine AlN particles (≤ 2 μm), whereas CaF2 favors the formation of larger particles (≥ 3 μm) by promoting material transport via liquid-phase formation. Furthermore, maintaining an intermediate temperature during synthesis enables AlN particles growth to 10 μm or more by reducing liquid-phase evaporation.