Laser micro-drilling of polymer plates for advanced GEM amplifying elements
摘要
For the first time, a method for fabricating a perforated metallised structure based on polyurethane has been implemented for the development of amplifying elements in a well-type gas electron multiplier (GEM). The structure was fabricated by additive manufacturing with further laser drilling for perforation, and subsequent metallisation with chromium (Cr) layer by magnetron sputtering. Scanning electron microscopy (SEM) confirmed the presence of an ordered array of holes in the fabricated perforated structures. Cross-sectional SEM analysis revealed a truncated conical shape of the drilled holes with an apex angle of 78°, with average diameters of 300±30