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Purpose <p>High-performance low-frequency vibration isolation is crucial for the precise operation of advanced equipment. To address the degradation in performance caused by the accumulation of inertial sensor (IS) noise in traditional absolute displacement feedback (ADF) methods, active vibration isolation method based on multi-sensor fusion absolute displacement feedback (MSF-ADF) is proposed.</p> Method <p>This method integrates mid-to-high frequency information from ISs with low-frequency information from relative displacement sensors (RDSs) through fusion filtering. As a result, MSF-ADF provides low-noise absolute displacement information across the entire frequency range, enabling high-precision feedback control. The orders and cut-off frequencies of the fusion filters are optimized to minimize sensor noise and achieve optimal low-frequency isolation performance.</p> Results and Conclusion <p>Experimental results demonstrate that the MSF-ADF achieves approximately -3&#xa0;dB vibration attenuation in the 0.3 Hz-1.5&#xa0;Hz range. MSF-ADF shows significantly reduced output force drift, demonstrating a root mean square (RMS) output force of 0.22 N for MSF-ADF compared to 1.16 N for ISI-ADF. MSF-ADF effectively mitigates noise accumulation while providing enhanced low-frequency vibration isolation performance.</p>

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Active Vibration Isolation Method Based on Multi-Sensor Fusion Absolute Displacement Feedback

  • 期刊论文

  • 发表日期：

    2025年9月2日

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  • Mingrui Jin,
  • Yamin Zhao,
  • Ming Han,
  • Jia Lei,
  • Junning Cui

摘要

Purpose

High-performance low-frequency vibration isolation is crucial for the precise operation of advanced equipment. To address the degradation in performance caused by the accumulation of inertial sensor (IS) noise in traditional absolute displacement feedback (ADF) methods, active vibration isolation method based on multi-sensor fusion absolute displacement feedback (MSF-ADF) is proposed.

Method

This method integrates mid-to-high frequency information from ISs with low-frequency information from relative displacement sensors (RDSs) through fusion filtering. As a result, MSF-ADF provides low-noise absolute displacement information across the entire frequency range, enabling high-precision feedback control. The orders and cut-off frequencies of the fusion filters are optimized to minimize sensor noise and achieve optimal low-frequency isolation performance.

Results and Conclusion

Experimental results demonstrate that the MSF-ADF achieves approximately -3 dB vibration attenuation in the 0.3 Hz-1.5 Hz range. MSF-ADF shows significantly reduced output force drift, demonstrating a root mean square (RMS) output force of 0.22 N for MSF-ADF compared to 1.16 N for ISI-ADF. MSF-ADF effectively mitigates noise accumulation while providing enhanced low-frequency vibration isolation performance.