Purpose <p>In the production and inspection of large display panels, it is very critical to minimize the warping deformation of glass substrates caused by environmental noise, which is guaranteed by vacuum adsorption device (VAD). Therefore, the structure design and optimization of a VAD are proposed in this paper to reduce the vibration interference caused by production line noise in the production of large display panels.</p> Methods <p>Firstly, based on the physical design requirements and configuration method in the production test, the layout optimization of the vacuum groove of the large VAD is completed. Secondly, the finite element model of the VAD is established by finite element analysis (FEA), and the stress and deformation distribution of the large display panel subjected to noise resonance under different working conditions are obtained by numerical analysis of acoustic and mechanical characteristics. In addition, the point cloud-based deformation measurement method is used to evaluate the adsorption effect and optimize the VAD of each configuration. Finally, through a series of simulation tests, it is successfully verified that the optimized VAD meets the design requirements in terms of structural strength and shape variables.</p> Results and Conclusions <p>The optimized VAD can reduce the vibration deformation caused by the production line noise of the large display panel by about 91.7% compared with the prototype, and keep the vibration deformation at the nanometer or even subnanometer level, which verifies the effectiveness of the detection guarantee for the production of large display panels.</p>